Definition
In semiconductor fabrication, a compound of silicon and a metal, such as nickel silicide or titanium disilicide.
Application
Selected low-resistivity silicides are used for contacts to silicon, gate electrodes, and local interconnects.
Related concepts
Evidence and further reading
- Evidence from tms.orghttps://www.tms.org/pubs/journals/JOM/0509/Chen-0509.html
- Evidence from ctcms.nist.govhttps://www.ctcms.nist.gov/~davydov/11Mota_SiNW_Contacts_Nanotech_22_75206.pdf