Definition
A process in which silicon reacts with a metal to produce a metal-silicide phase, commonly through thermal annealing.
Application
Used in contact fabrication, including self-aligned processes that form silicide on silicon source, drain, and gate regions.
Related search terms
Silicidation
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Related concepts
Evidence and further reading
- Evidence from tms.orghttps://www.tms.org/pubs/journals/JOM/0509/Chen-0509.html
- Evidence from ctcms.nist.govhttps://www.ctcms.nist.gov/~davydov/11Mota_SiNW_Contacts_Nanotech_22_75206.pdf