Definition
A silicon surface oriented parallel to the (100) crystallographic planes; parentheses identify the plane orientation.
Application
Used to specify wafer orientation for crystal-dependent processing, such as anisotropic etching of MEMS grooves, cavities, and membranes.
Related concepts
Evidence and further reading
- Evidence from dictionary.iucr.orghttps://dictionary.iucr.org/Miller_indices
- Evidence from ocw.mit.eduhttps://ocw.mit.edu/courses/2-674-micro-nano-engineering-laboratory-spring-2016/b16097f3abe75a9c249f50a0f5c5c957_MIT2_674S16_IntroToMEMS.pdf