Definition
A layered substrate with a silicon device layer electrically separated from the supporting substrate by a buried insulating layer.
Application
Used to fabricate electrically isolated semiconductor devices, including RF circuits, with reduced parasitic capacitance and substrate coupling.
Related concepts
Evidence and further reading
- Evidence from sumcosi.comhttps://www.sumcosi.com/english/products/process/
- Evidence from soitec.comhttps://www.soitec.com/home/products/product-platforms/rf-soi