Definition
The base material that supports a film or device structure fabricated on it.
Application
Provides the wafer platform for epitaxial silicon layers and buried-layer device structures.
Related concepts
Evidence and further reading
- Evidence from cambridge.orghttps://www.cambridge.org/core/journals/mrs-bulletin/article/abs/substrate-selection-for-thinfilm-growth/CF6D3E41AA10FE09A5C170CD734787F3
- Evidence from sumcosi.comhttps://www.sumcosi.com/english/products/lineup.html