Definition
Parasitic series resistance in the source and drain paths outside a transistor’s intrinsic channel, including semiconductor extension/access regions and contact interfaces.
Application
Extracted during transistor characterization and represented in compact models to identify parasitic performance limits and guide source/drain doping and contact engineering.
Related search terms
S/D series resistance; Source/drain series resistance
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Related concepts
Evidence and further reading
- Evidence from bsim.berkeley.eduhttps://www.bsim.berkeley.edu/BSIMCMG/BSIM-CMG_111.0.0_09122019.tar.gz
- Evidence from research.ibm.comhttps://research.ibm.com/publications/an-integrated-methodology-for-accurate-extraction-of-sd-series-resistance-components-in-nanoscale-mosfets