Definition
The excess free energy per unit area associated with a material’s surface relative to its bulk.
Application
Used to evaluate surface treatments that reduce adhesion and stiction of fine silicon-oxide structures during wafer cleaning and drying.
Related concepts
Evidence and further reading
- Evidence from openlearninglibrary.mit.eduhttps://openlearninglibrary.mit.edu/assets/courseware/v1/e681247bcbdf741133f950a6a41caa12/asset-v1%3AMITx%2B3.012S.3x%2B1T2019%2Btype%40asset%2Bblock/3012_Strengthening_and_Surface_Energy_reduced.pdf
- Evidence from ecs.confex.comhttps://ecs.confex.com/ecs/232/webprogram/Paper103888.html