Definition
For a circular semiconductor wafer, the lateral dimension through its center, excluding flats and other edge fiducials.
Application
Used to specify wafer size and check dimensional compatibility with wafer-processing equipment.
Related concepts
Evidence and further reading
- Evidence from semi.orghttps://www.semi.org/sites/semi.org/files/2024-07/CompilationTerms0624.pdf
- Evidence from store-us.semi.orghttps://store-us.semi.org/products/mf207400-semi-mf2074-guide-for-measuring-diameter-of-silicon-and-other-semiconductor-wafers