Definition
An intentional indentation in a wafer edge used as an orientation reference, commonly related to a crystallographic direction.
Application
Provides a detectable edge reference for setting wafer rotation in automated wafer alignment.
Related concepts
Evidence and further reading
- Evidence from semi.orghttps://www.semi.org/sites/semi.org/files/2024-07/CompilationTerms0624.pdf
- Evidence from hineautomation.comhttps://hineautomation.com/products/atmospheric-aligners/