Definition
A spatial representation that associates measurements, test results, or defects with their locations on a wafer.
Application
Used to examine spatial variation in wafer data and locate defects during manufacturing-process analysis.
Related concepts
Evidence and further reading
- Evidence from community.jmp.comhttps://community.jmp.com/t5/JMPer-Cable-Blog/How-to-make-a-wafer-map-in-JMP-in-under-30-seconds/ba-p/348607
- Evidence from kla.comhttps://www.kla.com/wp-content/uploads/Candela_8520.pdf