Definition
In electrical contact testing, the process of contacting devices or test structures on a wafer with probes to measure their electrical characteristics.
Application
Used to characterize prototype devices, monitor process test structures, and screen wafer-level chips electrically.
Related concepts
Evidence and further reading
- Evidence from mjc.co.jphttps://www.mjc.co.jp/en/products_service/wafer_prober/
- Evidence from swtest.orghttps://www.swtest.org/swtw_library/2007proc/PDF/T00_01_Broz_SWTW2007.pdf