Definition
In this glossary, alignment error means a deviation from the intended relative positioning of the wafer and mask image, evaluated with specified alignment references. This positioning-related error can contribute to printed overlay error: the relative displacement of patterns in different layers, which can also reflect imaging distortion and process effects.
Application
Used to assess positioning-related contributions to layer misregistration and guide alignment corrections; printed-pattern overlay metrology is used to evaluate the resulting interlayer displacement and guide further tool or process corrections.
Related search terms
Alignment offset; misalignment
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Evidence and further reading
- Evidence from asml.comhttps://www.asml.com/en/company/stories/2023/novel-lens-manipulator
- Evidence from asml.comhttps://www.asml.com/en/technology/lithography-principles/measuring-accuracy