Definition
The specified narrow band just inside a wafer's perimeter over which a stated wafer or process-quality parameter does not apply, thereby defining the boundary of the fixed quality area.
Application
Used in wafer specifications, geometry/metrology and process/yield evaluation to exclude the edge region where handling, bevel geometry and process nonuniformity make measurements less representative; reducing EE increases usable wafer area but tightens edge-control requirements.
Related search terms
Wafer edge exclusion; nominal edge exclusion
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Related concepts
Evidence and further reading
- Evidence from semi.orghttps://semi.org/sites/semi.org/files/2020-02/CompilationTerms1218_0.pdf
- Evidence from semi.orghttps://www.semi.org/en/products-services/standards/450mm-standards