Definition
An EUV pellicle is an extremely thin membrane mounted over an EUV mask to keep particles from reaching the mask pattern while transmitting enough 13.5 nm EUV radiation for productive exposure.
Application
Pellicles reduce the risk that particles on the mask surface print defects on many dies, but their transmission, thermal durability, and mechanical robustness must be engineered because any membrane in the EUV optical path absorbs some photons.
Related search terms
Extreme-ultraviolet pellicle; mask pellicle
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Related concepts
Evidence and further reading
- Evidence from asml.comhttps://www.asml.com/news/stories/2022/the-euv-pellicle-indistinguishable-from-magic
- Evidence from asml.comhttps://www.asml.com/en/products/euv-lithography-systems/twinscan-nxe-3600d