Definition
Exposure latitude is the allowable range of lithographic exposure dose over which printed features remain within specified dimensional or imaging limits, usually expressed as a percentage around a nominal dose.
Application
Process engineers use exposure latitude as part of the lithography process window: wider latitude gives more tolerance to dose variation while maintaining acceptable critical dimensions, improving manufacturability and yield margin.
Related search terms
Dose latitude; exposure-dose latitude
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Related concepts
Evidence and further reading
- Evidence from lab.semi.ac.cnhttps://lab.semi.ac.cn/library/upload/files/2022/3/25101710884.pdf
- Evidence from experts.azregents.eduhttps://experts.azregents.edu/en/publications/exposure-latitude-of-deep-ultraviolet-conformable-contact-photoli/