Definition
A process window is the region in a multidimensional process-parameter space within which the resulting feature or process output satisfies defined acceptance criteria; in lithography it is commonly evaluated as the acceptable combination of focus and exposure dose.
Application
Used to select robust operating conditions and quantify process latitude; lithography engineers use focus-exposure windows to balance depth of focus, exposure latitude, critical-dimension performance, and manufacturing yield.
Related search terms
Process latitude window; Acceptable process window
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Related concepts
Evidence and further reading
- Evidence from asml.comhttps://www.asml.com/en/news/press-releases/2001/asml-masktools-introduces-semiconductor-industry-s-fastest-simulation-tool-set
- Evidence from nanolithography.spiedigitallibrary.orghttps://nanolithography.spiedigitallibrary.org/journals/journal-of-micro-nanopatterning-materials-and-metrology/volume-22/issue-02/021007/Probabilistic-process-window--a-new-approach-to-focus-exposure/10.1117/1.JMM.22.2.021007.full