Definition
The k1 factor is the process-dependent coefficient in the Rayleigh lithography resolution relationship CD = k1 × wavelength / numerical aperture.
Application
Used to express how aggressively an optical lithography process is pushed; lower k1 requires stronger resolution-enhancement and process-control techniques.
Related search terms
k1 process factor; Rayleigh k1
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Related concepts
Evidence and further reading
- Evidence from asml.comhttps://www.asml.com/en/technology/lithography-principles/rayleigh-criterion
- Evidence from asml.comhttps://www.asml.com/en/technology/lithography-principles/pushing-k1-further