Definition
KrF lithography is deep-ultraviolet optical lithography using a krypton-fluoride excimer laser with a wavelength near 248 nm.
Application
Used for semiconductor wafer patterning at mature and mixed nodes, including metal, via, implant, and other layers that do not require shorter-wavelength exposure.
Related search terms
248 nm lithography; krypton-fluoride lithography
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Related concepts
Evidence and further reading
- Evidence from asml.comhttps://www.asml.com/en/products/duv-lithography-systems/twinscan-xt-1060k
- Evidence from asml.comhttps://www.asml.com/en/news/press-releases/2001/asml-introduces-new-krf-step-and-scan-system-that-extends