Definition
Lift-off is a patterning process in which material is deposited over a patterned sacrificial resist and then the resist is dissolved, removing overlying material and leaving the desired film pattern.
Application
Used to define metal and other thin-film features when subtractive etching would be difficult, damaging, or insufficiently selective.
Related search terms
lift-off patterning; metal lift-off
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Related concepts
Evidence and further reading
- Evidence from snfguide.stanford.eduhttps://snfguide.stanford.edu/guide/equipment/processing-technique/patterning/metal-lift-off
- Evidence from snfguide.stanford.eduhttps://snfguide.stanford.edu/guide/chemicals/resists/lift-off-layer