Definition
Spatial variation of a patterned feature's line width along its length relative to the average width.
Application
Used in lithography and critical-dimension metrology to quantify stochastic pattern variability that can affect device dimensions and performance.
Related search terms
linewidth roughness
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Related concepts
Evidence and further reading
- Evidence from nist.govhttps://www.nist.gov/programs-projects/dimensional-metrology-nanoscale-patterns
- Evidence from nist.govhttps://www.nist.gov/publications/unbiased-estimation-linewidth-roughness