Definition
Unpatterned prepared substrate and coating stack from which a photomask is fabricated; construction depends on mask technology.
Application
Used as the starting material for lithography masks; EUV mask blanks use specialized low-thermal-expansion substrates and reflective multilayer coatings before patterning.
Related search terms
photomask blank; EUV mask blank
Search phrases help you find this entry; their meaning depends on the context shown here.
Related concepts
Evidence and further reading
- Evidence from agcem.comhttps://www.agcem.com/products/euv-mask-blanks/
- Evidence from agc.comhttps://www.agc.com/en/innovation/pickup/electronics.html