Definition
An electrical network between an RF generator and a plasma chamber that transforms the chamber load impedance to suit the generator and reduce reflected power.
Application
Used to maintain effective RF power delivery in etch and plasma deposition tools, including tuning for different pulse states.
Related search terms
RF impedance-matching network; radio-frequency matching network
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Related concepts
Evidence and further reading
- Evidence from comsol.comhttps://www.comsol.com/paper/electromagnetic-compatibility-emc-simulation-of-rf-matching-network-for-plasma-application-137742
- Evidence from advancedenergy.comhttps://www.advancedenergy.com/en-us/products/plasma-power-products/rf-match-networks/navx/