Definition
A nitride of titanium used as a conductive thin-film material.
Application
Used as a barrier layer in tungsten-based semiconductor contacts and vias.
Related concepts
Evidence and further reading
- Evidence from arxiv.orghttps://arxiv.org/pdf/2310.14208
- Evidence from ir.appliedmaterials.comhttps://ir.appliedmaterials.com/news-releases/news-release-details/applied-materials-unique-integrated-linerbarrier-solution-hits