Definition
A tungsten-filled contact or via opening through an insulating layer, forming an electrical connection in an integrated circuit.
Application
Connects device regions or lower-level metal wiring to an overlying metal layer.
Related concepts
Evidence and further reading
- Evidence from patents.google.comhttps://patents.google.com/patent/US5600182A/en
- Evidence from patents.google.comhttps://patents.google.com/patent/US5916855A/en