Definition
The electric potential at or near the hydrodynamic slipping plane of a particle or surface in liquid, relative to the bulk liquid.
Application
Used to assess the dispersion stability of abrasive particles in semiconductor CMP slurries and the effects of dilution on those dispersions.
Related concepts
Evidence and further reading
- Evidence from nvlpubs.nist.govhttps://nvlpubs.nist.gov/nistpubs/SpecialPublications/NIST.SP.260-208.pdf
- Evidence from malvernpanalytical.comhttps://www.malvernpanalytical.com/tw/learn/knowledge-center/application-notes/an101104highlyconcentratedcmpslurry