Definition
An intentionally formed void between interconnect structures that acts as an extremely low-effective-k insulating region and reduces capacitive coupling between nearby metal lines.
Application
Used in advanced BEOL interconnect schemes to reduce capacitance and RC delay, with added integration, mechanical and thermal-management tradeoffs.
Related search terms
Interconnect air gap
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Related concepts
Evidence and further reading
- Evidence from imec-int.comhttps://www.imec-int.com/en/press/imec-introduces-intermetallics-and-airgaps-advanced-interconnect-metallization-schemes
- Evidence from research.ibm.comhttps://research.ibm.com/publications/performance-and-reliability-of-airgaps-for-advanced-beol-interconnects