Definition
On-chip electrical wiring formed from aluminum or aluminum-alloy metallization, historically dominant before copper and still used in selected semiconductor technologies and bond-pad structures.
Application
Used for signal and power routing in legacy and specialty IC processes and for aluminum metallization or bond-pad applications where its process integration remains suitable.
Related search terms
Al interconnect; aluminum metallization
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Related concepts
Evidence and further reading
- Evidence from appliedmaterials.comhttps://www.appliedmaterials.com/us/en/semiconductor/products/processes/pvd.html
- Evidence from ir.appliedmaterials.comhttps://ir.appliedmaterials.com/news-releases/news-release-details/applied-materials-introduces-advantedge-metal-etch-system