Definition
An unintended connection of resist, conductor or other patterned material between adjacent features that are intended to remain electrically or physically separated.
Application
Detected during lithography, etch and patterned-wafer inspection because a bridge can block a space, distort pattern transfer or create an electrical short between neighboring lines or structures.
Related search terms
Bridging defect; pattern bridge; nano-bridge
Search phrases help you find this entry; their meaning depends on the context shown here.
Related concepts
Evidence and further reading
- Evidence from bbp.kla.comhttps://bbp.kla.com/wp-content/themes/pint/assets/bbp/pdf/broadband-brightfield-inspection-for-immersion-lithography.pdf
- Evidence from doi.orghttps://doi.org/10.1016/j.heliyon.2025.e43377