Definition
An electrical test structure containing many contacts connected in series so a single resistance or continuity measurement samples the integrity of a large number of contact interfaces.
Application
Used on semiconductor test chips for process monitoring, yield analysis and reliability studies; an open or high-resistance contact in the chain can reveal contact-formation defects that are difficult to detect from individual product circuits.
Related search terms
Contact-chain test structure; Kelvin chain (specific form)
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Related concepts
Evidence and further reading
- Evidence from fabweb.ece.illinois.eduhttps://fabweb.ece.illinois.edu/lab/devices/contacts.aspx
- Evidence from nvlpubs.nist.govhttps://nvlpubs.nist.gov/nistpubs/Legacy/IR/nistir4890.pdf