Definition
Positive photoresist is photoresist in which exposed regions become more soluble in developer and are preferentially removed during development.
Application
Used in photolithography to form a resist image that removes exposed areas and leaves unexposed resist protecting selected wafer regions for subsequent pattern transfer.
Related search terms
Positive resist; Positive-tone photoresist
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Related concepts
Evidence and further reading
- Evidence from semiconductor.samsung.comhttps://semiconductor.samsung.com/support/tools-resources/dictionary/photoresist-printing-the-circuit-onto-the-wafer/
- Evidence from microchemicals.comhttps://www.microchemicals.com/PRODUCTS/Photochemicals/Photoresist/