Definition
On-chip interconnect wiring made with ruthenium, studied as an alternative to copper for aggressively scaled metal layers.
Application
Investigated and demonstrated in advanced logic and memory interconnect development, including directly etched local wiring and buried power rails, to address resistance and RC-delay limits of scaled copper interconnects.
Related search terms
Ru interconnect
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Related concepts
Evidence and further reading
- Evidence from imec-int.comhttps://www.imec-int.com/en/press/imec-demonstrates-16nm-pitch-ru-lines-record-low-resistance-obtained-using-semi-damascene
- Evidence from imec-int.comhttps://www.imec-int.com/en/articles/imec-reports-breakthrough-in-extending-interconnects-beyond-the-3nm-technology-node